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Product details
Small, multi-stage plasma cleaning machine
purpose
● Improve the adhesion and surface modification of various materials
● Ashing and etching treatment
Pre treatment of plastic packaging
Pre treatment of printed substrate coating
● Processing of LED related components
● Cleaning of electronic components
● photoresist stripping or surface residue removal
Cleaning of precision components such as optical, metal, and mechanical parts
Surface modification of resin products containing fluorinated resins
● FCC correspondence
features
600W small high output power
The electrode can be selected in sections 1, 2, and 3 (specified during procurement)
● Can handle vertical sample storage box
● Optional RIE/DP mode (specified during procurement)
● Data logger (optional)
● Adaptation point memory function (optional)
Specifications
purpose
● Improve the adhesion and surface modification of various materials
● Ashing and etching treatment
Pre treatment of plastic packaging
Pre treatment of printed substrate coating
● Processing of LED related components
● Cleaning of electronic components
● photoresist stripping or surface residue removal
Cleaning of precision components such as optical, metal, and mechanical parts
Surface modification of resin products containing fluorinated resins
● FCC correspondence
features
600W small high output power
The electrode can be selected in sections 1, 2, and 3 (specified during procurement)
● Can handle vertical sample storage box
● Optional RIE/DP mode (specified during procurement)
● Data logger (optional)
● Adaptation point memory function (optional)
Specifications
| model | PDC610 |
| Plasma mode | RIE/DP (fixed mode) |
| Electrode structure | 3-section independent parallel flat plate (fixed) |
| High frequency output | Max600W |
| frequency | 13.56MHz |
| Control and Display Mode | PLC · Touch screen |
| Reaction chamber size | W350×D270×H300mm |
| Reaction chamber material | A5052 |
| Reactive gas | System 2 (Ar, O2) |
| Fill gas | N2 or dry air |
| Vacuum pump | Oil pump (approximately 345L/min) · Standard configuration |
| External dimensions | W600×D722×H700mm |
| Exterior material | stainless steel |
| Power Supply | 3-phase AC200 50/60Hz 15A |
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